Annealing Equipment - List of Manufacturers, Suppliers, Companies and Products

Annealing Equipment Product List

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Third light heating source! LED annealing device

Energy saving through improved heating efficiency! Achieving reduced thermal budget with high responsiveness.

The "LED Annealing Device" is the third light heating source following halogen heaters and flash lamps. It achieves energy savings through improved heating efficiency and reduces thermal budget with high-speed responsiveness. Real-time temperature measurement using a radiation thermometer is possible. Additionally, it can heat the surface of substrates and demonstrates excellent heating efficiency for metal materials. 【Features】 ■ Improved heating efficiency ■ High-speed responsiveness ■ High-precision temperature measurement ■ High uniformity ■ Capability to heat substrate surfaces *For more details, please refer to the PDF document or feel free to contact us.

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Various film formation and annealing equipment

A lineup tailored to your needs! Film deposition equipment and annealing equipment using lamp heating.

At Omura Giken, we design and manufacture film deposition devices and annealing equipment using lamp heating to meet our customers' needs. We offer a lineup that includes vertical LP-CVD devices, vertical annealing devices, PE-CVD devices, and MO-CVD devices. 【Features】 ■ Custom design and manufacturing to meet needs ■ Film deposition devices and lamp heating annealing equipment ■ Diverse lineup *For more details, please refer to the PDF materials or feel free to contact us.

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Flash Lamp Annealing Device "SUS980 Series"

Depending on the work size, multiple flash lamps can be arranged! Large area simultaneous irradiation and high-intensity irradiation are possible!

The "SUS980 Series" is a flash lamp annealing device that can be used for applications such as crystallization, peeling, and oxide film formation. By controlling the current flowing through the lamp with a semiconductor switch to turn it ON/OFF, the pulse width of the lamp current can be adjusted, allowing for control of the heating depth (0.1 to 60 msec). Multiple flash lamps can be arranged according to the work size for large-area simultaneous irradiation, enabling high irradiation. 【Features】 ■ Depth control (pulse control) ■ ON/OFF control of the current flowing through the lamp using a semiconductor switch ■ Adjustable lamp current pulse width for controlling heating depth (0.1 to 60 msec) ■ Multiple pulse irradiation is also possible ■ High output and large-area simultaneous processing (shortened tact time, high uniformity) *For more details, please refer to the PDF document or feel free to contact us.

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